COMPUTER AIDED EVALUATION OF DESIGN RULES FOR MICRO PARTS

Albers, A.; Burkardt, N.; Marz, J.; Hauser, S.


Type:
Year:
2005
Editor:
A. Samuel, W. Lewis
Author:
Series:
ICED
Section:
Design for X
Page(s):
319-320 (exec. Summ.), full paper no. DS35_329.49
Keywords:

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